An article in the Journal of the Electrochemical Society describes an experiment to investigate the low-pressure vapor deposition of polysilicon. The experiment was carried out in a large-capacity reactor at Sematech in Austin, Texas. The reactor has several wafer positions, and four of these positions are selected at random. The response variable is film thickness uniformity. Three replicates of the experiment were run, and the data are as follows:
Water Position
Uniformity
1
2.76
5.67
4.49
2
1.43
1.70
2.19
3
2.34
1.97
1.47
4
0.94
1.36
1.65
(a) Estimate the total variability in the uniformity response.
(b) How much of the total variability in the uniformity response is due to the difference between positions in the reactor?
(c) To what level could the variability in the uniformity response be reduced, if the position-to-position variability in the reactor could be eliminated? Do you believe this is a significant reduction?

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