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Engineering, 21.03.2020 08:24 Isabella1319

Purity of copper films by evaporation and sputtering.

(a) Discuss three factors that affect the purity of copper films when deposited by evaporation from a tungsten filament.

(b) Discuss three factors that affect the purity of copper films when deposited by argon sputtering of a copper target.

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Purity of copper films by evaporation and sputtering.

(a) Discuss three factors that af...

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