Engineering, 21.08.2019 21:10 hottie20

What is the resolution limit for a projection type of photolithographic system if the incident wavelength is 365 nm (the i-line of hg), n. a.=0.63, and k1=0.6. what is the depth of field needed for the best resolution?

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What is the resolution limit for a projection type of photolithographic system if the incident wavel...