Chemistry, 02.02.2022 09:30 lexyjasmin6781
Highly purified tetrachlorosilane (SiCl4) gas is reacted with hydrogen gas (H2) to produce electronic-grade polycrystalline silicon at 800oC and 1.5×105 P according to the equation:
4()+2H2()→()+4H ()
There are concerns that the reaction experiences diffusional limitations at the growing Si solid surface. Estimate the molecular diffusion coefficient for:
a. SiCl4 in H2
b. SiCl4 in a gas phase mixture containing 40 mol%
Answers: 1
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Highly purified tetrachlorosilane (SiCl4) gas is reacted with hydrogen gas (H2) to produce electroni...
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