Engineering, 03.06.2021 01:20 makwoods417ow2txa
7. (15) An accelerometer has a mass of 1.5 g and silicon sensor parts. The four flexural members are 110 microns long and their cross section is a square, with 4 microns by 4 microns. Silicon has a modulus of elasticity of 150 GPa. (a) Find the relation between the acceleration and the strain measured by any of the piezoresistive sensors on the vertical flexural members. (b) Calculate the strain at an acceleration of 2.1g if the strain gauges are small and placed 0.03 mm from the center of the flexural member. (State your assumptions. If you are missing any information to solve the problem, leave those as variables, if applicable)
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7. (15) An accelerometer has a mass of 1.5 g and silicon sensor parts. The four flexural members are...
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